Title: RTA-preparation of b-FeSi2 layers from MBE-grown FeSi films deposited on SiGe(100) substrates
Authors: Libezny, Milan ×
Poortmans, Jef
Dekoster, J
Degroote, Stefan
Vantomme, André
Langouche, Guido
de Lange, B. G. M
Nijs, Johan #
Issue Date: 1995
Host Document: pages:407-412
Conference: Rapid Thermal and Integrated Processing IV; April 17-20, 1995; San Francisco, CA, USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section
ESAT - ELECTA, Electrical Energy Computer Architectures
× corresponding author
# (joint) last author

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