Title: Study of Ni-silicide contacts to Si:C source/drain
Authors: Mertens, Sofie ×
Cho, Yonah
Nouri, Faran
Schreutelkamp, Rob
Kim, Yihwan
Verheyen, Peter
Steenbergen, Johnny
Vrancken, Christa
Bender, Hugo
Richard, Olivier
Van Daele, Benny
Vandervorst, Wilfried
Geenen, Luc
Absil, Philippe
Kubicek, Stefan
Demeurisse, Caroline
Tokei, Zsolt
Lauwers, Anne #
Issue Date: Nov-2006
Publisher: ECS
Host Document: pages:139
Conference: Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 2: New Materials, Processes, and Equipment location:Leuven Belgium date:29/10/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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