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ITEM METADATA RECORD
Title: Metal and polySi (Ge) micromechanical devices for high frequency application
Authors: PAMIDIGHANTAM, SAYANU ×
Jansen, Henri
Verbist, Agnes
Tilmans, Harrie
Baert, Kris
Puers, Robert #
Issue Date: 2000
Host Document: pages:673-676
Conference: Proceedings of SeSens; December 1, 2000; Veldhoven, The Netherlands.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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