Title: The IMEC clean : A new concept for particle and metal removal on Si surfaces
Authors: Meuris, Marc ×
Mertens, Paul
Opdebeeck, Ann
Schmidt, Harald
Depas, Michel
Vereecke, Guy
Heyns, Marc
Philipossian, A #
Issue Date: 1995
Publisher: PennWell Corporation
Series Title: Solid State Technology vol:38 issue:7 pages:109-114
ISSN: 0038-111X
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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