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Title: Impact of residual high-energy boron implantation induced p-well defects on shallow junctions
Authors: Poyai, Amporn ×
Simoen, Eddy
Claeys, Cor
Rooyackers, Rita
Badenes, Gonçal #
Issue Date: 2000
Host Document: pages:129-135
Conference: Proceedings SAFE; 29-30 November 2000; Veldhoven, The Netherlands.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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