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Title: Lifetime study in advanced isolation techniques
Authors: Poyai, Amporn
Simoen, Eddy
Claeys, Cor
Rooyackers, Rita
Badenes, Gonçal
Issue Date: 2000
Conference: International Conference on Electronic Materials & European Materials Research Society Spring Meeting. Symposium M: Advanced Cha
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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