ITEM METADATA RECORD
Title: Compensation effect during water desorption from siloxane-based spin-on dielectric thin films
Authors: Proost, Joris ×
Baklanov, Mikhaïl
Maex, Karen
Delaey, Lucas #
Issue Date: 2000
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:B18 issue:1 pages:303-306
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
Physical Metallurgy and Materials Engineering Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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