Title: Microtexture and electromigration-induced drift in electroplated damascene Cu
Authors: Proost, Joris ×
Hirato, Tetsuji
Furuhara, T
Maex, Karen
Celis, Jean-Pierre #
Issue Date: 15-Mar-2000
Series Title: Journal of Applied Physics vol:87 issue:6 pages:2792-2802
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
Chemical and Extractive Metallurgy Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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