Title: Stress Reduction in Tungsten CVD Films by RTA Post-Treatment of Ti/TiN Bilayers in Ammonia
Authors: Palmans, Roger
Mouroux, Aliette
Zhang, S. L
Petersson, S
Maex, Karen
Issue Date: 1995
Conference: Conference on Advanced Metallization and Interconnect Systems for ULSI Applications; October 3-5, 1995; Portland, Oregon, USA.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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