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Title: Electrical characterization of high-k materials prepared by Atomic Layer CVD (ALCVD)
Authors: Carter, Richard ×
Cartier, Eduard
Caymax, Matty
De Gendt, Stefan
Degraeve, Robin
Groeseneken, Guido
Heyns, Marc
Kauerauf, Thomas
Kerber, Andreas
Kubicek, Stefan
Lujan, Guilherme
Pantisano, Luigi
Tsai, Wilman
Young, Edward #
Issue Date: 2001
Host Document: pages:94-99
Conference: Extended Abstracts of the International Workshop on Gate Insulator. IWGI 2001; 1-2 November 2001; Tokyo, Japan. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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