Title: On the use of SF5/Ar/Ga for the analysis of very thin dielectrica with TOFSIMS
Authors: Conard, Thierry
Vandervorst, Wilfried
Issue Date: 2001
Conference: 13th International Conference on Secondary Ion Mass Spectrometry - SIMS 13; 11-16 November 2001; Nara, Japan. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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