|ITEM METADATA RECORD
|Title: ||Germanium content dependence of the leakage current of recessed SiGe source/drain junctions|
|Authors: ||Simoen, Eddy|
Bargallo Gonzalez, Mireia
|Issue Date: ||2006 |
|Conference: ||2nd Workshop on Defects Relevant to Engineering Advanced Silicon-Based Devices location:Leuven Belgium date:08/09/06|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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