Title: Germanium content dependence of the leakage current of recessed SiGe source/drain junctions
Authors: Simoen, Eddy
Bargallo Gonzalez, Mireia
Eneman, Geert
Verheyen, Peter
Benedetti, A
Loo, Roger
Claeys, Corneel
Issue Date: 2006
Conference: 2nd Workshop on Defects Relevant to Engineering Advanced Silicon-Based Devices location:Leuven Belgium date:08/09/06
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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