ITEM METADATA RECORD
Title: Errors in near-surface and interfacial profiling of boron and arsenic
Authors: Vandervorst, Wilfried ×
Janssens, Tom
Brijs, Bert
Conard, Thierry
Huyghebaert, Cedric
Frühauf, J
Bergmaier, A
Dollinger, G
Buyuklimanli, T
VandenBerg, J.A
Kimura, K #
Issue Date: May-2004
Publisher: Elsevier
Host Document: pages:618-631
Conference: Proceedings of the 14th Int. Conference on Secondary Ion Mass Spectometry and Related Topics location:Leuven Belgium date:14/09/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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