|ITEM METADATA RECORD
|Title: ||Depth profiling of ZrO2/SiO2/Si stacks-a TOF-SIMS and computer simulation study|
|Authors: ||Ignatova, V.A ×|
Gijbels, R #
|Issue Date: ||May-2004 |
|Host Document: ||pages:603-608|
|Conference: ||Proceedings of the 14th Int. Conference on Secondary Ion Mass Spectrometry and Related Topics - SIMS XIV date:14/09/03|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
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