Title: High-resolution scanning spreading resistance microscopy of surrounding-gate transistors
Authors: Alvarez, D ×
Schömann, S
Goebel, B
Manger, D
Schlösser, T
Slesazeck, S
Hartwich, J
Kretz, J
Eyben, Pierre
Fouchier, Marc
Vandervorst, Wilfried #
Issue Date: Jan-2004
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:22 issue:1 pages:377-380
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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