Title: High resolution two-dimensional carrier profiling on sub-100nm silicon nano-devices using scanning spreading resistance microscopy
Authors: Eyben, Pierre ×
Fukutome, H
Alvarez, David
Vandervorst, Wilfried #
Issue Date: 2004
Publisher: IEEE
Host Document: pages:101-104
Conference: Proceedings of the 34th European Solid-State Device Research Conference - ESSDERC location:Leuven Belgium date:21/09/04
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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