Title: Assessing the performance of two-dimensional dopant profiling techniques
Authors: Duhayon, Natasja ×
Eyben, Pierre
Fouchier, Marc
Clarysse, Trudo
Vandervorst, Wilfried
Álvarez, D
Schoemann, S
Ciappa, M
Stangoni, M
Fichtner, W
Formanek, P
Kittler, M
Raineri, V
Giannazzo, F
Goghero, D
Rosenwaks, Y
Shikler, R
Saraf, S
Sadewasser, S
Barreau, N
Glatzel, T
Verheijen, M
Mentink, S.A.M
Von Sprekelsen, M
Maltezopoulos, T
Wiesendanger, R
Hellemans, Louis #
Issue Date: Jan-2004
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:22 issue:1 pages:385-393
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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