Title: Characterization of electrically active dopant profiles with the spreading resistance probe
Authors: Clarysse, Trudo ×
Vanhaeren, Danielle
Hoflijk, Ilse
Vandervorst, Wilfried #
Issue Date: Dec-2004
Publisher: Elsevier Sequoia
Series Title: Materials Science & Engineering R, Reports vol:47 issue:5-6 pages:123-206
ISSN: 0927-796X
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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