Title: Selective airgaps: towards a scalable lowk solution
Authors: Gueneau de Mussy, Jean Paul
Beyer, Gerald
Maex, Karen
Issue Date: 2005
Publisher: Springer
Host Document: pages:77-84
Publication status: published
KU Leuven publication type: IHb
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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