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Title: Raised source/drains with disposable spacers for sub 100nm CMOS technologies
Authors: De Meyer, Christina ×
Kubicek, Stefan
Van Meer, Hans #
Issue Date: 2001
Host Document: pages:87-90
Conference: Extended Abstracts of International Workshop on Junction Technology location:Leuven Belgium date:29/11/01
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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