|ITEM METADATA RECORD
|Title: ||Trends in advanced wet cleaning technologies, challenges in the removal of nanoparticles|
|Authors: ||Holsteyns, Frank ×|
Mertens, Paul #
|Issue Date: ||2004 |
|Conference: ||Advanced Wet Cleans in Semiconductor Manufacturing Mykrolis Seminar location:Leuven Belgium date:15/09/04|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Clinical Residents Medicine|
× corresponding author|
# (joint) last author|
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