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Title: Simulations and measurements of capacitance in dielectric stacks and consequences for integration
Authors: De Roest, David ×
Donaton, R. A
Stucchi, Michele
Maex, Karen
Nauwelaers, Bart #
Issue Date: Mar-2001
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:55 issue:01/04 pages:29-35
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT- TELEMIC, Telecommunications and Microwaves
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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