Title: Ion-bombardment effects on PtSi/n-Si Schottky contacts studied by ballistic electron emission microscopy
Authors: Ruttens, Gerlinde ×
Qu, X. P
Zhu, S. Y
Li, Bing-Zong
Detavernier, C
Van Meirhaeghe, R. L
Cardon, F
Donaton, R. A
Maex, Karen #
Issue Date: 2000
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:18 issue:4 pages:1942-1948
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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