Title: Internal stresses in aluminium interconnects
Authors: Saerens, Annelies ×
Van Houtte, Paul
Witvrouw, Ann #
Issue Date: 2000
Publisher: Trans tech publications ltd
Series Title: Materials Science Forum vol:347-349 pages:556-561
Conference: 5th European Conference on Residual Stress - ECRS5; 28-30 September 1999; Delft, The Netherlands.
Abstract: Al-1wt.%Si-0.5wt.%Cu films and passivated lines of different thicknesses varying from 1 mum to 0.4 mum are studied. High thermal stresses are present in such systems. Macroscopic stresses are determined using different X-ray stress measuring approaches, i.e. (1) the classical d-sin(2)psi method; (2) the LIBAD method (Low Incident Beam Angle Diffraction, especially developed for stress measurements in thin layers) and (3) the crystallite group method. Thermal stresses are calculated using the finite element method and compared to the experimentally obtained stresses.
ISSN: 0255-5476
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Mechanical Metallurgy Section (-)
× corresponding author
# (joint) last author

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