Title: Effect of HF solution on the porous structure of low-k SICOH film
Authors: Shamiryan, Denis
Baklanov, Mikhaïl
Vanhaelemeersch, Serge
Maex, Karen
Issue Date: 2000
Conference: Advanced Metallization Conference; October 2000; San Diego, Ca, USA.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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