ITEM METADATA RECORD
Title: Effect of HF solution on the porous structure of low-k SICOH film
Authors: Shamiryan, Denis
Baklanov, Mikhaïl
Vanhaelemeersch, Serge
Maex, Karen
Issue Date: 2000
Conference: Advanced Metallization Conference; October 2000; San Diego, Ca, USA.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

Files in This Item:

There are no files associated with this item.

Request a copy

 




All items in Lirias are protected by copyright, with all rights reserved.