Title: HfSiO(N) composition depth profiling: can we get a quantitative answer using SIMS?
Authors: Conard, Thierry ×
Brijs, Bert
Vandervorst, Wilfried
Van Elshocht, S
Mack, P
Weber, U
Lehnen, P #
Issue Date: 2006
Conference: SIMS Europe: 5th European Workshop on Secondary Ion Mass Spectrometry location:Leuven Belgium date:24/09/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.