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Title: Stress build-up during the Ni-silicidation in and around narrow silicide lines
Authors: Steegen, An
Lauwers, A
Chamirian, Oxana
Bender, Hugo
De Wolf, Ingrid
de Potter de ten Broeck, Muriel
De Tavernier, C
Maex, Karen
Issue Date: 2000
Conference: MRS Spring Meeting 2000. Symposium C: Gate Stack and Silicide Issues in Silicon Processing; 24-28 April 2000; San Francisco, Ca,
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous

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