Title: Practicalities and limitations of scanning capacitance microscopy for routine integrated circuit characterization
Authors: Stephenson, Robert ×
De Wolf, Peter
Trenkler, Thomas
Hantschel, Thomas
Clarysse, Trudo
Jansen, Philippe
Vandervorst, Wilfried #
Issue Date: 2000
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:B18 issue:1 pages:555-559
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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