Title: Nonmonotonic behavior of the scanning capacitance microscope for large dynamic range samples
Authors: Stephenson, Robert ×
Verhulst, Anne
De Wolf, Peter
Caymax, Matty
Vandervorst, Wilfried #
Issue Date: 2000
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:B18 issue:1 pages:405-408
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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