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Title: Material characteristics and damascene patterning of a fluoropolymer low-k film
Authors: Struyf, Herbert
Donaton, R. A
Lepage, Muriel
Lanckmans, Filip
Vereecke, Guy
Maex, Karen
Vanhaelemeersch, Serge
Scheid, D
Issue Date: 2000
Conference: Advanced Metallization Conference; October 2000; San Diego, CA, USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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