This item still needs to be validated !
|ITEM METADATA RECORD
|Title: ||Material characteristics and damascene patterning of a fluoropolymer low-k film|
|Authors: ||Struyf, Herbert|
Donaton, R. A
|Issue Date: ||2000 |
|Conference: ||Advanced Metallization Conference; October 2000; San Diego, CA, USA. location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
Associated Section of ESAT - INSYS, Integrated Systems
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.