Title: Evaluating probes for "electrical" atomic force microscopy
Authors: Trenkler, Thomas ×
Hantschel, Thomas
Stephenson, Robert
De Wolf, Peter
Vandervorst, Wilfried
Hellemans, Louis
Malavé, A
Büchel, D
Oesterschulze, E
Kulisch, W
Niedermann, P
Sulzbach, T
Ohlsson, O #
Issue Date: 2000
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:B18 issue:1 pages:418-427
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Chemistry - miscellaneous
× corresponding author
# (joint) last author

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