Title: CMOS foundry-based micromachining
Authors: Tilmans, Harrie ×
Baert, Kris
Verbist, Agnes
Puers, Robert #
Issue Date: 1995
Host Document: pages:183-187
Conference: Proceedings of the Micromechanics Europe Workshop '95; 3-5 Sept. 1995; Copenhagen, Denmark. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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