|ITEM METADATA RECORD
|Title: ||CMOS foundry-based micromachining|
|Authors: ||Tilmans, Harrie ×|
Puers, Robert #
|Issue Date: ||1995 |
|Host Document: ||pages:183-187|
|Conference: ||Proceedings of the Micromechanics Europe Workshop '95; 3-5 Sept. 1995; Copenhagen, Denmark. location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||ESAT - MICAS, Microelectronics and Sensors|
× corresponding author|
# (joint) last author|
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