Title: Modeling of bombardment induced oxidation of silicon
Authors: De Witte, H
Vandervorst, Wilfried
Gijbels, Renaat #
Issue Date: 2001
Series Title: Journal of Applied Physics vol:89 issue:5 pages:3001-3011
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science