|ITEM METADATA RECORD
|Title: ||Modeling of bombardment induced oxidation of silicon|
|Authors: ||De Witte, H|
Gijbels, Renaat #
|Issue Date: ||2001 |
|Series Title: ||Journal of Applied Physics vol:89 issue:5 pages:3001-3011|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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