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Title: Mechanism of O2-anneal induced Vfb shifts of Ru gated stacks
Authors: Li, Zilan ×
Schram, Tom
Pantisano, Luigi
Stesmans, Andre
Conard, Thierry
Shamuilia, Sheron
Afanas'ev, Valeri
Akheyar, Amal
Van Elshocht, Sven
Brunco, David
Deweerd, Wim
Naoki, Yamada
Lehnen, Peer
De Gendt, Stefan
De Meyer, Christina #
Issue Date: Apr-2007
Series Title: Microelectronics Reliability vol:47 issue:4-5 pages:518-520
ISSN: 0026-2714
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
Semiconductor Physics Section
Electrical Engineering - miscellaneous
Molecular Design and Synthesis
× corresponding author
# (joint) last author

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