Title: Formation of epitaxial CoSi2 by a Cr or Mo interlayer: comparison with a Ti interlayer
Authors: Detavernier, C ×
Van Meirhaeghe, R. L
Cardon, F
Maex, Karen
Bender, Hugo
Brijs, Bert
Vandervorst, Wilfried #
Issue Date: 2001
Series Title: Journal of Applied Physics vol:89 issue:4 pages:2146-2150
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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