Title: Controlling CoSi2 nucleation: the effect of entropy of mixing
Authors: Detavernier, C ×
Van Meirhaeghe, R. L
Maex, Karen
Cardon, F #
Issue Date: 2001
Publisher: MRS
Host Document: pages:C7.9.1-C7.9.6
Conference: Gate Stack and Silicide Issues in Silicon Processing date:24/04/00
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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