Title: Silicide engineering: influence of alloying elements on CoSi2 nucleation
Authors: Detavernier, C ×
Van Meirhaeghe, R. L
Maex, Karen
Cardon, F #
Issue Date: 2001
Host Document: pages:C8.4.1-C8.4.6
Conference: Gate stack and silicide issues in silicon processing; MRS Spring Meeting 2000 Symposium.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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