AVS 6th International Conference on Atomic Layer Deposition - ALD, Location: Leuven Belgium
Publication date:
2006-01-01
Author:
Kaushik, Vidya
Deweerd, W ; Rohr, Erika ; Hyun, S ; Aoulaiche, Marc ; Degraeve, Robin ; De Gendt, Stefan ; Houssa, Michel ; Heyns, Marc