Title: Engineering of ALD Hf-silicates for low standby power applications
Authors: Kaushik, Vidya
Deweerd, W.
Rohr, Erika
Hyun, S.
Aoulaiche, Marc
Degraeve, Robin
De Gendt, Stefan
Houssa, Michel
Heyns, Marc #
Issue Date: 2006
Conference: AVS 6th International Conference on Atomic Layer Deposition - ALD location:Leuven Belgium date:24/07/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Molecular Design and Synthesis
Department of Materials Engineering - miscellaneous
# (joint) last author

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