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Title: Characterization and integration in Cu damascene structures of AURORA, an inorganic low-k dielectric
Authors: Donaton, R. A ×
Coenegrachts, Bart
Sleeckx, Erik
Schaekers, Marc
Sophie, Guus
Matsuki, N
Baklanov, Mikhaïl
Struyf, Herbert
Lepage, Muriel
Vanhaelemeersch, Serge
Beyer, Gerald
Stucchi, Michele
De Roest, David
Maex, Karen #
Issue Date: 2001
Host Document: pages:D5.14.1-D5.14-6
Conference: Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics date:23/04/00
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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