Title: Anomalously week antenna ratio dependence of plasma process-induced damage
Authors: Van den bosch, G ×
Creusen, Martin
Degraeve, Robin
Kaczer, Ben
Groeseneken, Guido #
Issue Date: 2000
Host Document: pages:6-9
Conference: Proceedings of the 5th International Symposium on Plasma Process-Induced Damage (P2ID); 23-24 May 2000; Santa Clara, CA, USA.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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