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|ITEM METADATA RECORD
|Title: ||Cost effective realization of nanoscaled interdigitated electrodes|
|Authors: ||Van Gerwen, Peter ×|
Mertens, Robert #
|Issue Date: ||2000 |
|Series Title: ||Journal of Micromechanics and Microengineering: Structures, Devices and Systems vol:10 issue:3 pages:N1-N5|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||ESAT - MICAS, Microelectronics and Sensors|
× corresponding author|
# (joint) last author|
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