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Title: Cost effective realization of nanoscaled interdigitated electrodes
Authors: Van Gerwen, Peter ×
Laureyn, Wim
Campitelli, Andrew
Jacobs, P
Detemple, P
Baert, Kris
Sansen, Willy
Mertens, Robert #
Issue Date: 2000
Publisher: IOP
Series Title: Journal of Micromechanics and Microengineering: Structures, Devices and Systems vol:10 issue:3 pages:N1-N5
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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