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Title: An auto-adhesion model for MEMS surfaces taking into account the effect of surface roughness
Authors: van Spengen, Willem Merlijn ×
De Wolf, Ingrid
Puers, Robert #
Issue Date: 2000
Publisher: SPIE
Host Document: pages:104-112
Conference: Materials and Device Characterization in Micromachining III date:17/09/00
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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