|ITEM METADATA RECORD
|Title: ||Verification of 2D SRP by the Analysis of Known Lateral Profiles|
|Authors: ||Vandervorst, Wilfried|
|Issue Date: ||1995 |
|Conference: ||Proceedings of the 3rd International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semico location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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