Title: Verification of 2D SRP by the Analysis of Known Lateral Profiles
Authors: Vandervorst, Wilfried
Clarysse, Trudo
Caymax, Matty
Privitera, Vittorio
Issue Date: 1995
Conference: Proceedings of the 3rd International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semico location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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