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Title: Lattice defects in high quality as-grown CZ silicon, studied with light scattering and preferential etching techniques
Authors: Vanhellemont, Jan ×
Kissinger, G
Gräf, D
Depas, Michel
Brohl, M
Lambert, U
Heyns, Marc
Claeys, Cor
Richter, H
Wagner, Patrick #
Issue Date: 1995
Publisher: Trans Tech Publications
Series Title: Materials Science Forum vol:196 pages:1755-1760
Conference: Proceedings 18th International Conference on Defects in Semiconductors - ICDS-18; July 23 -28, 1995; Sendai, Japan. location:Leuven Belgium
ISSN: 0255-5476
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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