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Title: Spectroscopic study of oxygen related lattice defects in annealed silicon
Authors: Vanhellemont, Jan ×
Libezny, Milan
Simoen, Eddy
Claeys, Cor
Clauws, P
Blondeel, A #
Issue Date: 1995
Host Document: pages:2399-402
Conference: 22nd International Conference on the Physics of Semiconductors; 15-19 August 1994; vancouver, BC, Canada. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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