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Title: Characterization of (ultra)thin dielectrica
Authors: Vandervorst, Wilfried
De Witte, Hilde
Conard, Thierry
Janssens, Tom
Schaekers, Marc
Brijs, Bert
Houssa, Michel
Issue Date: 2000
Conference: Quantitative Surface Analysis-11; 3-7 July 2000; Surrey, UK. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Physics and Astronomy - miscellaneous
Semiconductor Physics Section

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