|ITEM METADATA RECORD
|Title: ||Formation of deep submicrometer cobalt silicated poly gate using bilayer processes|
|Authors: ||Wang, Qingfeng ×|
Maex, Karen #
|Issue Date: ||1995 |
|Host Document: ||pages:519-24|
|Conference: ||Proceedings of the 5th International Symposium on Ultra Large Scale Integration Science and Technology; 21-26 May 1995; Reno, NV location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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