Title: Formation of deep submicrometer cobalt silicated poly gate using bilayer processes
Authors: Wang, Qingfeng ×
Lauwers, A
Deweerdt, Bruno
Verbeeck, Rita
Maex, Karen #
Issue Date: 1995
Host Document: pages:519-24
Conference: Proceedings of the 5th International Symposium on Ultra Large Scale Integration Science and Technology; 21-26 May 1995; Reno, NV location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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