Title: Process-Induced Stress in LOPOS Isolated Si Structures Measured with Micro-Raman Spectroscopy
Authors: Watté, J
Provoost, R
Silverans, Roger
De Wolf, Ingrid
Maes, Herman
Issue Date: 1995
Conference: Annual Meeting of the Belgian Physical Society; May 1995;
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Solid State Physics and Magnetism Section
Associated Section of ESAT - INSYS, Integrated Systems

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