Title: Influence of the Pt electrode on the properties of sol-gel PZT-films
Authors: Willems, Geert ×
Wouters, D. J
Maes, Herman #
Issue Date: 1995
Series Title: Microelectronic Engineering vol:29 pages:217-220
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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