Title: In situ transmission electron microscopy study of the silicidation process in Co thin films on patterned (001) Si substrates
Authors: Ghica, C
Nistor, Leona
Bender, Hugo
Steegen, A
Lauwers, A
Maex, Karen
Van Landuyt, J #
Issue Date: 2001
Series Title: Journal of Materials Research vol:16 issue:3 pages:701-708
ISSN: 0884-2914
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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