|ITEM METADATA RECORD
|Title: ||In situ transmission electron microscopy study of the silicidation process in Co thin films on patterned (001) Si substrates|
|Authors: ||Ghica, C|
Van Landuyt, J #
|Issue Date: ||2001 |
|Series Title: ||Journal of Materials Research vol:16 issue:3 pages:701-708|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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